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发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH06267491(A)
申请公布日期
1994.09.22
申请号
JP19930075288
申请日期
1993.03.09
申请人
NIPPON STEEL CORP
发明人
NISHIMURA HIROSHI
分类号
H01J37/04;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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