| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide electron beam welding equipment where metal vapor generated upon welding is positively recovered or the soaring of metal vapor or the like stuck to the wall face of a vacuum chamber is suppressed, and the re-sticking of the metal vapor or the like to the object to be welded can be suppressed. <P>SOLUTION: The electron beam welding device 1 is provided with: a vacuum chamber 13 storing a superconduction acceleration cavity 3; an electron gun 17 emitting an electron beam to the superconduction acceleration cavity 3 stored in the vacuum chamber 13; and a vacuum device 19 performing the evacuation of the vacuum chamber 13. A metal vapor recovery member 37 charged negativelly is installed between the electron gun 17 and the superconduction acceleration cavity 3, they are charged positively or negatively, respectively, and soaring suppression chambers 45 composed by a plurality of charged plates 47 arranged at intervals are installed on the floor 43 of the vacuum chamber 13. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
