Vibrating mirror element

摘要

This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.

主权项

1. A vibrating mirror element (100, 200, 300) comprising:
a mirror portion (10); a deformable first driving portion (41, 341), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction beyond a first end portion of said mirror portion on said first side of said first direction and a first free end (41b) formed on a second side of said first direction beyond a second end portion of said mirror portion on said second side of said first direction, and linearly extending along said first direction; a first mirror support portion (46, 246, 346) capable of supporting said mirror portion in a state where said mirror portion is inclined in response to an inclination of said first free end in driving; a deformable second driving portion (51, 351), being cantilevered, including a second fixed end (51a) formed on said second side of said first direction beyond said second end portion of said mirror portion on said second side of said first direction and a second free end (51b) formed on said first side of said first direction beyond said first end portion of said mirror portion on said first side of said first direction, being point-symmetrical to said first driving portion with respect to a center of said mirror portion, and linearly extending along said first direction; and a second mirror support portion (56, 256, 356) being point-symmetrical to said first mirror support portion with respect to said center of said mirror portion and capable of supporting said mirror portion in a state where said mirror portion is inclined in response to an inclination of said second free end in driving.