发明名称 OPTICAL METHOD FOR THE CHARACTERIZATION OF INTEGRATED CIRCUITS
摘要 <p>Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.</p>
申请公布号 EP1242785(B1) 申请公布日期 2014.10.15
申请号 EP20000955841 申请日期 2000.08.23
申请人 BROWN UNIVERSITY RESEARCH FOUNDATION 发明人 MARIS, HUMPHREY, J.
分类号 G01B11/02;G01B11/06;G01N21/17;G01N21/21;G01N21/47;G01N21/95;G01N21/956;G01N29/24 主分类号 G01B11/02
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