Volatile group 2 metal precursors

摘要

A compound comprising one or more polyfunctionalized pyrrolyl anions coordinated to a metal selected from the group consisting of barium, strontium, magnesium, radium or calcium or mixtures thereof. Alternatively, one anion can be substituted with and a second non-pyrrolyl anion.;Synthesis of the novel compounds and their use to form BST films is also contemplated.

主权项

1. A compound having the following formula: where R1-R16 are each individually acyl; formyl; amido; nitro; H; C1-C10 primary, secondary or tertiary alkyl; C1-C10 alkoxy; alkylamine; C1-C10 alkyl functionalized with a heteroatom substituted ring structure selected from the group consisting of imidazole, pyrrole, pyridine, furan, pyrimidine, pyrazole; C1-C10 alkyl functionalized with an amide group; C1-C10 alkyl functionalized with an ester group and mixtures thereof; wherein (L) is a neutral ligand individually selected from the group consisting of aliphatic C1-C20 ether or polyether; crownether; amine; poly amine; amide; poly amide; ester; polyester; aromatic ether; aromatic ester; aromatic amide; aromatic amine; pyridine; imidazole; pyridine; pyrazine; furan; pyrrole and mixtures thereof; M2 and M3 are individually selected from the group consisting of Ba, Sr, Ca, Ra or Mg; and each n independently=0-4.