Method for fabricating an electromechanical transducer

摘要

An electromechanical transducer includes a first electromagnetic element and a second electromagnetic element, such as electrodes, disposed opposite to each other with a sealed cavity therebetween. The sealed cavity is formed by removing a sacrifice layer and then performing sealing. A sealing portion is formed by superposing a film of a hardened second sealing material that has fluidity at normal temperature on a film of a first sealing material that does not have fluidity at normal temperature.

主权项

1. A method for fabricating an electromechanical transducer including a first electromagnetic element and a second electromagnetic element disposed opposite to each other with a sealed cavity therebetween, the method comprising:
forming a sacrifice layer on the first electromagnetic element and patterning the sacrifice layer; forming a vibrating membrane on the sacrifice layer; forming an etching hole in the vibrating membrane; etching the sacrifice layer through the etching hole and thereby forming the cavity; forming a film of a first sealing material that does not have fluidity at normal temperature on the vibrating membrane having the etching hole; forming a film of a second sealing material that has fluidity at normal temperature on the film of the first sealing material; hardening and patterning the film of the second sealing material; and etching the film of the first sealing material using the patterned film of the second sealing material as a mask and thereby forming a sealing portion that seals the cavity.