发明名称 LEAF SPRING, STAGE SYSTEM, AND LITHOGRAPHIC APPARATUS
摘要 A leaf spring to be mounted between two objects, the leaf spring configured to have a high stiffness in two orthogonal directions, and a relative low stiffness in other degrees of freedom, wherein the leaf spring has a substantially panel-shaped body, the leaf spring including a first mounting location at or near the center of the panel-shaped body to mount the leaf spring to a first of the two objects, wherein the leaf spring includes one or more second mounting locations at or near the circumference of the panel-shaped body to mount the leaf spring to the second of the two objects, and elongate grooves and/or slits in the panel shaped body between the first mounting location and the second mounting location, the grooves and/or slits running in at least two non-orthogonal directions in the plane of the two orthogonal directions.
申请公布号 KR101450167(B1) 申请公布日期 2014.10.13
申请号 KR20110109173 申请日期 2011.10.25
申请人 发明人
分类号 H01L21/027;H01L21/683 主分类号 H01L21/027
代理机构 代理人
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