发明名称 SUPPORT ELEMENTS FOR AN OPTICAL ELEMENT
摘要 Support elements for an optical element and a method for supporting an optical element are disclosed. The disclosure can be used in connection with arbitrary optical apparatuses or optical imaging methods. In particular, the disclosure can be used in connection with the microlithography employed in the manufacture of microelectronic circuits.
申请公布号 KR101449793(B1) 申请公布日期 2014.10.13
申请号 KR20117009951 申请日期 2009.09.30
申请人 发明人
分类号 G02B7/00;G03F7/20 主分类号 G02B7/00
代理机构 代理人
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