发明名称 |
MEMS DIGITAL VARIABLE CAPACITOR DESIGN WITH HIGH LINEARITY |
摘要 |
The present invention generally relates to a MEMS DVC and a method for fabrication thereof. The MEMS DVC comprises a plate movable from a position spaced a first distance from an RF electrode and a second position spaced a second distance from the RF electrode that is less than the first distance. When in the second position, the plate is spaced from the RF electrode by a dielectric layer that has an RF plateau over the RF electrode. One or more secondary landing contacts and one or more plate bend contacts may be present as well to ensure that the plate obtains a good contact with the RF plateau and a consistent C max value can be obtained. On the figure PB contact is the plate bend contact, SL contact is the Second Landing contact and the PD electrode is the Pull Down electrode. |
申请公布号 |
WO2014165624(A1) |
申请公布日期 |
2014.10.09 |
申请号 |
WO2014US32723 |
申请日期 |
2014.04.02 |
申请人 |
CAVENDISH KINETICS, INC |
发明人 |
KNIPE, RICHARD, L.;VAN KAMPEN, ROBERTUS, PETRUS |
分类号 |
H01G5/16;H01G5/18;H01H59/00 |
主分类号 |
H01G5/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|