发明名称 Semiconductor Device
摘要 Provided are a semiconductor device and a fabricating method of the semiconductor device. The semiconductor device may include an interlayer dielectric film formed on a substrate and including a trench, a gate insulating film formed in the trench, a first work function control film formed on the gate insulating film of the trench along bottom and sidewalls of the trench, a first metal gate pattern formed on the first work function control film of the trench and filling a portion of the trench, and a second metal gate pattern formed on the first metal gate pattern of the trench, the second metal gate pattern different from the first metal gate pattern.
申请公布号 US2014299939(A1) 申请公布日期 2014.10.09
申请号 US201314132306 申请日期 2013.12.18
申请人 Samsung Electronics Co., Ltd. 发明人 Kim Ju-Youn
分类号 H01L27/088;H01L27/092 主分类号 H01L27/088
代理机构 代理人
主权项 1. A semiconductor device comprising: an interlayer dielectric film formed on a substrate and including a trench; a gate insulating film formed in the trench; a work function control film formed on the gate insulating film of the trench along bottom and sidewalls of the trench; a first metal gate pattern formed on the work function control film of the trench and filling a portion of the trench; and a second metal gate pattern formed on the first metal gate pattern of the trench, the second metal gate pattern different from the first metal gate pattern.
地址 Suwon-si KR