| 摘要 |
The present invention relates to an evaporation source assembly in which a receiving area for receiving an organic material and a space structure of an evaporation area in which the organic material is evaporated are improved. An evaporation source assembly according to the present invention includes a crucible having a shape of a container receiving an organic material and an outlet formed at an upper side thereof, through which the evaporated organic material is discharged; a heater part disposed in the crucible to provide heat to evaporate the organic material received in the crucible; and a thermal equilibrium part disposed in an evaporation area in which the organic material in the crucible is evaporated, wherein the thermal equilibrium part divides the evaporation area into a plurality of local evaporation areas, and each space of the local evaporation areas is smaller than a space of the evaporation area, wherein heat generated from the heater part is transferred into the spaces of the local evaporation areas, each of which is smaller than the space of the evaporation area. Thus, since the thermal equilibrium part is disposed in the evaporation area, by which the space of the evaporation area is divided into the spaces of the local evaporation areas, so that thermal equilibrium may be achieved in the crucible, the evaporation of the organic material is uniformly maintained such that a process of uniformly forming a film on a substrate may be performed. |
