| 发明名称 |
POLISHING PAD WITH FOUNDATION LAYER AND POLISHING SURFACE LAYER |
| 摘要 |
<p>Polishing pads with foundation layers and polishing surface layers are described. In an example, a polishing pad for polishing a substrate includes a foundation layer. A polishing surface layer is bonded to the foundation layer. Methods of fabricating polishing pads with a polishing surface layer bonded to a foundation layer are also described.</p> |
| 申请公布号 |
EP2785496(A2) |
申请公布日期 |
2014.10.08 |
| 申请号 |
EP20120723064 |
申请日期 |
2012.05.16 |
| 申请人 |
NEXPLANAR CORPORATION |
发明人 |
ALLISON, WILLIAM, C.;SCOTT, DIANE;LEFEVRE, PAUL ANDRE;LACASSE, JAMES, P.;SIMPSON, ALEXANDER, WILLIAM |
| 分类号 |
B24D18/00;B24B37/20;B24B37/22;B24B37/24;B24B37/26 |
主分类号 |
B24D18/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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