Additiv für eine Zusammensetzung zum Polieren,申请号DE20071103303T-传众专利搜索

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发明名称	Additiv für eine Zusammensetzung zum Polieren
摘要
申请公布号	DE112007003303(T5)	申请公布日期	2009.12.03
申请号	DE20071103303T	申请日期	2007.09.26
申请人	NITTA HAAS INC.	发明人	TERAMOTO, MASASHI;HIGASHIGAKI, RYOKO;MAKINO, HIROSHI
分类号	H01L21/304;B24B37/00;C09K3/14	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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