| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination device which achieves various types of illumination different in illumination angle or diffusibility with a single illumination device by using a half mirror and a liquid crystal panel, thereby facilitating an inspection.SOLUTION: The illumination device includes an illumination light source 1, a liquid crystal panel 2, a diffuser panel 3, and a half mirror 4. In the Figure, a camera 11 and an inspection object 8 are arranged to be perpendicular to each other. Light 5 emitted from the illumination light source 1 is incident on the liquid crystal panel 2. Among the light, light having passed through an opening of an image displayed on the liquid crystal panel 2 passes through the liquid crystal panel 2, and is incident on the diffuser panel 3 arranged almost adhered to the liquid crystal panel 2 and diffused to become diffused light 6. The diffused light 6 is incident on the half mirror 4, and part of the light 6 passes through the half mirror 4 and illuminates the inspection object 8 as illumination light 7. The light 9 reflected by the inspection object 8 is further reflected by the half mirror 4, and the reflected light 10 enters a lens of the camera 11. Thus, the image of the inspection object 8 is captured by the camera 11. |
