INSPECTION DEVICE AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique of performing an inspection regarding generation, movement, and recombination of a photoexcited carrier in a portion where pulse light for inspection hardly reaches.SOLUTION: An inspection device 100 inspects a solar battery panel 90 that is one kind of photo device. The inspection device 100 includes: an irradiation part 12 for irradiating a light reception surface 9FS of the solar battery panel 90 with pulse light (pulse light LP11 for inspection) emitted from a femtosecond laser 121; a detection part 13 for detecting an electromagnetic wave pulse LT1 generated from the solar battery panel 90 in response to the irradiation with the pulse light LP11 for inspection; and a continuous light irradiation part 14 for irradiating a part of a back surface 9BS on an opposite side of the solar battery panel 90 with continuous light CW, the irradiated part of the back surface 9BS corresponding to a part of the light reception surface 9FS irradiated with the pulse light LP11 for inspection.