| 摘要 |
PROBLEM TO BE SOLVED: To provide a microdevice that can easily bring about the contact effect of preventing a base plate and a movable structure from being fixed during manufacture and during use, and a method of manufacturing the same.SOLUTION: A base plate 1A and movable structures 5c and 5e are connected to each other by a support part 5c, and the support part 5cis thermally oxidized to form a thermal oxidation film 7. Subsequently, the thermal oxidation film 7 is etching-removed. Thus, protrusions 3d and 5f for prevention of fixation are formed in at least one of the base plate 1A and the movable structures 5c and 5e. |
