| 摘要 |
<p>PROBLEM TO BE SOLVED: To hold a substrate in which an active part is formed while correcting a warp of the substrate.SOLUTION: A substrate holding device for holding a substrate in which an active part is formed on one surface of the substrate comprises a holding part for holding the substrate in a state inclining in a direction where a peripheral part of the substrate projects toward the side of the active part.</p> |
