| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a support pin for inspecting a substrate, for supporting such that an inspection coordinate of the substrate to be inspected is not positionally fluctuated even when a pushing-in force is added to the substrate at the time of probing, and the like.SOLUTION: A support pin 11 for inspecting a substrate is arranged in order to prevent the substrate to be inspected from being pushed in to one side surface side at the time of probe pinning. The support pin 11 for inspecting the substrate includes: a pin body 12 movable forwards and backwards; and a contact detection element 22 disposed so as to be floating with an elastic biasing force from a conductive tip face 13a side of the pin body 12 in an advancing direction thereof. During advancing of the pin body 12, an insulation surface 24a side of the contact detection element 22 is brought into contact with the other side surface side of the substrate to be inspected and is pushed back, and a conductive rear face 24b thereof is brought into conductive contact with the tip face 13a side of the pin body 12. A switch function stops the motion of the pin body 12 triggered by the above-described fact. Probing in a state that the other side surface side of the substrate to be inspected is supported is allowed by adding the switch function to the contact detection element 22.</p> |
