ELECTRIC COMPONENT AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an electric component improved in reliability.SOLUTION: The electric component includes: a substrate 100; a functional element 120 formed on the substrate; a first layer 109 forming a cavity 130 for storing the functional element on the substrate and having a plurality of through holes; and a second layer 110 formed on the first layer and blocking the plurality of the through holes 109d. The first layer is provided with a first film 109a, a second film 109b on the first film, and a third film 109c on the second film. The first film and the third film have compression stress larger than that of the second film.