PATTERN FORMATION DEVICE AND PATTERN FORMATION METHOD

摘要

PROBLEM TO BE SOLVED: To butt a proof or a board on a blanket with the high precision of position.SOLUTION: While the peripheral part of a blanket being held in adsorptive manner by a frame-like lower stage 61, the central part of the blanket is locally held by a plurality of hands 625 which can rise and fall individually. By making a transfer roller unit 64 run along the undersurface of the blanket so as to push up the blanket partially, the blanket is abutted on the proof or board arranged above a blanket. Since the hand 625 descends in series with movement of the transfer roller unit 64 so as to evacuate downward, the interference with the transfer roller unit 64 is avoided.