发明名称 Semiconductor device and method for manufacturing the same
摘要 <p>A semiconductor device in which a lateral bipolar transistor and a CMOS transistor are hybrid-integrated, and the lateral bipolar transistor includes an open region opened in a device isolating oxide film surrounding an active region; a polysilicon film formed on the open region; and a protective film covering at least a part of a peripheral surface of the active region exposed by opening the open region in the device isolating oxide film, wherein the polysilicon film has such a thickness as to expose the active region out of the polysilicon film, and the protective film is a film for preventing the active region from being etched when the polysilicon film is etched to the thickness.</p>
申请公布号 EP2784823(A2) 申请公布日期 2014.10.01
申请号 EP20140168446 申请日期 2008.12.19
申请人 ASAHI KASEI EMD CORPORATION 发明人 KORICIC, MARKO;SULIGOJ, TOMISLAV;MOCHIZUKI, HIDENORI;MORITA, SOICHI
分类号 H01L29/735;H01L21/331;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;H01L29/08;H01L29/10 主分类号 H01L29/735
代理机构 代理人
主权项
地址