发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 <p>PROBLEM TO BE SOLVED: To achieve high integration and reduction in parasitic capacitance.SOLUTION: A semiconductor device according to an embodiment comprises: a foundation layer; a first wiring provided on the foundation layer and extending in a first direction; a second wiring provided adjacent to the first wiring on the foundation layer and extending in the first direction; an insulating layer provided between the first wiring and the second wiring; a third wiring provided between the foundation layer and the insulating layer and extending in the first direction. A group of wirings including the first wiring, the second wiring, and the third wiring is periodically aligned in a second direction crossing the first direction.</p>
申请公布号 JP2014183135(A) 申请公布日期 2014.09.29
申请号 JP20130055779 申请日期 2013.03.18
申请人 TOSHIBA CORP 发明人 WATANABE TAKASHI
分类号 H01L21/3205;H01L21/306;H01L21/3065;H01L21/768;H01L23/522 主分类号 H01L21/3205
代理机构 代理人
主权项
地址