| 摘要 |
PURPOSE: A temperature control system for manufacturing a substrate is provided to simplify a cooling system by controlling the temperature of a wall of a chamber, a chamber lead, an inner part of the chamber, a substrate support unit, a cooling unit, and an impurity removing unit. CONSTITUTION: A temperature control system for manufacturing a substrate includes a chamber(10), a substrate support unit(20), and a temperature control device. The chamber provides a reactive space. The substrate support unit is installed in the chamber and supports a substrate(22). A temperature controller(60) controls the temperature of one of the chamber and the substrate support unit by generating the air with high temperature and low temperature using the compressed air or high pressed air. |
