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发明名称
Method for forming CNT layer on a substrate, and method for manufacturing biosensor by using the forming method
摘要
申请公布号
KR101444068(B1)
申请公布日期
2014.09.26
申请号
KR20130024917
申请日期
2013.03.08
申请人
发明人
分类号
G01N27/414;H01L21/336;H01L29/78
主分类号
G01N27/414
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