X-RAY ANALYZING APPARATUS

摘要

Conjointly provided are a first correcting unit (13A, 13B) to estimate, on the basis of the whole sum of counting rates determined by a counting unit (10A, 10B), a peak position in an energy spectrum obtained in the counting unit (10A, 10B) and to output an initial value which is a gain value required to render the estimated peak position to coincide with a reference position, and a second correcting unit (14A, 14B) to detect, in the energy spectrum obtained in the counting unit (10A, 10B), the peak position within a predetermined energy range containing the reference position and to output a dynamic gain correction value which is a gain value required to render the detected peak position to coincide with the reference position.

主权项

1. An X-ray analyzing apparatus which comprises:
a detector to generate pulses of a pulse height, corresponding to an energy of X-rays incident thereupon, in a number corresponding to an intensity of the X-rays; a high speed analog-to-digital converter to digitize the pulses generated by the detector; a counting unit to calculate the intensity of the X-rays on the basis of an energy spectrum representing a distribution of counting rates relative to the pulse heights, which is obtained by determining the counting rates of pulses from the high speed analog-to-digital converter, which are classified for a plurality of continuous pulse height ranges; and a peak position stabilizing unit to stabilize a peak position in the energy spectrum with respect to the pulses from the high speed analog-to-digital converter;in which the peak position stabilizing unit comprises:
an input pulse multiplier to which the pulses from the high speed analog-to-digital converter are inputted, the input pulse multiplier providing an output by changing a gain; a first correcting unit to estimate the peak position in the energy spectrum on the basis of a whole sum of the counting rates determined by the counting unit and then to output an initial value, which is a gain value required to render the peak position, so estimated, to coincide with a reference position; a second correcting unit to detect the peak position in the energy spectrum, obtained in the counting unit, within a predetermined energy range containing the reference position, and to output a dynamic gain correction value, which is a gain value required to render the peak position, so detected, to coincide with the reference position; and a gain adder to which the initial value and the dynamic gain correction value are inputted, the gain adder to add the both together and then to output them to the input pulse multiplier.