Microfluidic device with multilayer coating

摘要

A microfluidic device comprised of a material layer and a fluid transport feature having at least one characteristic dimension of less than 500 micrometers formed in or on the material layer. A chemically resistant, thermally stable and biocompatible multilayer coating is provided onto and in contact with the microfluidic device, wherein the multilayer coating includes one or more thin film layers comprised primarily of hafnium oxide or zirconium oxide and one or more thin film layers comprised primarily of tantalum oxide, the multilayer coating being located on a surface of the fluid transport feature. The corrosion resistant film can be formed on the surfaces of fluid transport features of microfluidic devices using atomic layer deposition film forming methods that produce conformal films that cover complex geometries, thereby enabling the corrosion resistant film to be formed on all surfaces of the fluid transport features of the microfluidic device.

主权项

1. A microfluidic device comprising:
a material layer; a fluid transport feature having at least one characteristic dimension of less than 500 micrometers formed in or on the material layer; and a multilayer coating including alternating thin film layers of two or more thin film layers comprised primarily of hafnium oxide or zirconium oxide and of two or more thin film layers comprised primarily of tantalum oxide, the multilayer coating being located on a surface of the fluid transport feature wherein the alternating thin film layers are not crystalline.