Floating body cell structures, devices including same, and methods for forming same

摘要

Floating body cell structures including an array of floating body cells disposed on a back gate and source regions and drain regions of the floating body cells spaced apart from the back gate. The floating body cells may each include a volume of semiconductive material having a channel region extending between pillars, which may be separated by a void, such as a U-shaped trench. The floating body cells of the array may be electrically coupled to another gate, which may be disposed on sidewalls of the volume of semiconductive material or within the void therein. Methods of forming the floating body cell devices are also disclosed.

主权项

1. A floating body cell device, comprising:
a plurality of floating bodies individually comprising a semiconductive material and extending from a back gate to a source region and a drain region, the floating bodies being aligned in a first direction in a plurality of rows and in a second direction in a plurality of columns, the first and second directions being different from one another, the back gate extending across both rows and columns of the floating bodies; and another gate associated with individual of the plurality of floating bodies.