PROBE GUIDE PLATE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a probe guide plate in which displacement of through holes for guiding a probe can be suppressed, and a manufacturing method thereof.SOLUTION: The probe guide plate has a substrate 52 in which through holes 54 for guiding a probe are formed, and a first insulating film 54 is selectively formed on inner walls of the through holes 54 of the substrate 52, areas in the vicinity of the through holes 54 on a first principal surface of the substrate 52, and areas in the vicinity of the through holes 54 on a second principal surface opposite to the first principal surface of the substrate 52.