| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump that is low in vibration and excellent in heat dissipation properties of a ball bearing.SOLUTION: A vacuum pump comprises a bearing retaining part 50 that retains a ball bearing, and the bearing retaining part 50 comprises: an inner retaining ring 51 that retains an outer ring on the inner peripheral side and includes a plurality of convex parts 511 and a plurality of concave parts 512 alternately formed in a circumferential direction on the outer peripheral side; an outer retaining ring 52 that is fixed to a base 2 so as to be arranged on the outer peripheral side of the inner retaining ring 51 and includes a plurality of convex parts 521 and a plurality of concave parts 522 formed on the inner peripheral side so as to be opposed to the plurality of convex parts 511 and the plurality of concave parts 512 respectively; and a plate spring 53 that is interposed annularly between the inner retaining ring 51 and the outer retaining ring 52 while being elastically deformed like a corrugated plate so that an inner peripheral surface and an outer peripheral surface partially contact the plurality of convex parts 511 and the plurality of convex parts 521 respectively. |
