发明名称 |
VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, VIBRATION ELEMENT MANUFACTURING METHOD, ELECTRONIC APPARATUS AND MOBILE BODY
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摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element capable of adjusting a proper vibration frequency without differentiating the length of a movable electrode as a vibration chip.SOLUTION: The vibration element includes: a substrate; a first electrode portion disposed on one surface of the substrate; a stationary portion; and a second electrode portion extending from the stationary portion with a gap relative to the first electrode portion in such a manner that a part of the second electrode portion in a plan view from the vertical direction to the one surface overlaps with the first electrode portion. The second electrode portion includes a weight portion which is disposed to overlap with the first electrode portion, in a plan view of the first electrode portion and the second electrode portion. |
申请公布号 |
JP2014170999(A) |
申请公布日期 |
2014.09.18 |
申请号 |
JP20130040410 |
申请日期 |
2013.03.01 |
申请人 |
SEIKO EPSON CORP |
发明人 |
WATANABE TORU ; EBINA AKIHIKO |
分类号 |
H03H9/24;B81B3/00;B81C1/00;G01P15/10;H03B5/30;H03H3/007;H03H9/02 |
主分类号 |
H03H9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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