发明名称 VIBRATION ELEMENT, VIBRATOR, OSCILLATOR, VIBRATION ELEMENT MANUFACTURING METHOD, ELECTRONIC APPARATUS AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide a vibration element capable of adjusting a proper vibration frequency without differentiating the length of a movable electrode as a vibration chip.SOLUTION: The vibration element includes: a substrate; a first electrode portion disposed on one surface of the substrate; a stationary portion; and a second electrode portion extending from the stationary portion with a gap relative to the first electrode portion in such a manner that a part of the second electrode portion in a plan view from the vertical direction to the one surface overlaps with the first electrode portion. The second electrode portion includes a weight portion which is disposed to overlap with the first electrode portion, in a plan view of the first electrode portion and the second electrode portion.
申请公布号 JP2014170999(A) 申请公布日期 2014.09.18
申请号 JP20130040410 申请日期 2013.03.01
申请人 SEIKO EPSON CORP 发明人 WATANABE TORU ; EBINA AKIHIKO
分类号 H03H9/24;B81B3/00;B81C1/00;G01P15/10;H03B5/30;H03H3/007;H03H9/02 主分类号 H03H9/24
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