| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibrator capable of conveniently mounting a compact piezoelectric vibrator by stably and accurately picking it up at a prescribed position and accurately transporting the piezoelectric vibrator to a prescribed position.SOLUTION: The method for manufacturing a piezoelectric vibrator comprises in a mounting step: a step of sucking a piezoelectric vibration piece using a sucking jig; a step of aligning the positions of the piezoelectric vibration piece and a stud bump; and a step of flip-chip joining the piezoelectric vibration piece to the stud bump. The sucking jig has a holding face for holding the piezoelectric vibration piece by a negative pressure, and a plurality of fine through-holes 86 penetrating from the holding face to a face on the opposite side of the holding face and used for generating the negative pressure, at least two or more of the through-holes overlapping the piezoelectric vibration piece in the sucking step. |
