| 发明名称 |
METHOD AND SYSTEM FOR IDENTIFYING A CLEAN ENDPOINT TIME FOR A CHAMBER |
| 摘要 |
Systems and methods are provided for determining a clean endpoint time for a current run of a chamber. The clean endpoint time for the current run may be determined by determining that a chamber parameter, such as a chamber pressure, has stabilized. Historical clean endpoint time data is updated by adding the clean endpoint time for the current run of the chamber. A recommended clean endpoint time is then determined for the chamber based on the updated historical clean endpoint time data. |
| 申请公布号 |
US2014279750(A1) |
申请公布日期 |
2014.09.18 |
| 申请号 |
US201414208688 |
申请日期 |
2014.03.13 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
Iliopoulos Ilias;Na Shuo;Albor Jose |
| 分类号 |
H01L21/66;G06N99/00;G06N5/04 |
主分类号 |
H01L21/66 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method comprising:
determining, by a processing device, a clean endpoint time for a current run of a chamber; updating, by the processing device, historical clean endpoint time data by adding the clean endpoint time for the current run of the chamber to the historical clean endpoint time data; and determining, by the processing device, a recommended clean endpoint time for the chamber based on the updated historical clean endpoint time data. |
| 地址 |
SANTA CLARA CA US |
