发明名称 Multi-Gate and Complementary Varactors in FinFET Process
摘要 A varactor includes at least one semiconductor fin, a first gate, and a second gate physically disconnected from the first gate. The first gate and the second gate form a first FinFET and a second FinFET, respectively, with the at least one semiconductor fin. The source and drain regions of the first FinFET and the second FinFET are interconnected to form the varactor.
申请公布号 US2014264628(A1) 申请公布日期 2014.09.18
申请号 US201313801089 申请日期 2013.03.13
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Lin Chi-Hsien;Lu Ying-Ta;Liao Hsien-Yuan;Chen Ho-Hsiang;Jou Chewn-Pu;Hsueh Fu-Lung
分类号 H01L27/088 主分类号 H01L27/088
代理机构 代理人
主权项 1. A varactor comprising: at least one semiconductor fin; a first gate; and a second gate physically disconnected from the first gate, wherein the first gate and the second gate form a first FinFET and a second FinFET, respectively, with the at least one semiconductor fin, and wherein source and drain regions of the first FinFET and the second FinFET are interconnected to form the varactor.
地址 Hsin-Chu TW