| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress variation in spectrum width such as an E95 width caused by a machine difference at manufacture of a laser device, and variation in spectrum width such as an E95 width accompanying exchange or maintenance of the laser device, and to stabilize the quality of an integrated circuit pattern formed by an exposure device of a semiconductor.SOLUTION: An upper limit value and a lower limit value for a spectrum width common to a plurality of band narrowed laser devices are set preliminarily. Before the band narrowed laser device is used as a light source for semiconductor exposure, such as at maintenance and shipment of the band narrowed laser device, laser oscillation of the band narrowed laser device is performed to detect the spectrum width. In this case, a spectrum width adjustment part included in the band narrowed laser device is adjusted so that the spectrum width becomes a value between the upper limit value and the lower limit value that are preliminarily set.</p> |
