Display Apparatus with Narrow Gap Electrostatic Actuators

摘要

This disclosure provides systems, methods and apparatus for incorporating tip-gap adjustment features (TGAF) in actuators of shutter assemblies. The TGAF are incorporated into a drive beam of the actuator during the formation of the shutter assembly over a mold. The TGAF are configured such that they develop a mechanical stress or stress gradient. When the shutter assembly is released from the mold, the stress or stress gradient in the TGAF bend the drive beam such that a tip-gap between the drive beam and a load beam of the actuator is reduced. The reduced tip-gap, in turn, reduces an actuation voltage needed to actuate the shutter assembly.

主权项

1. A display element, comprising:
a substrate; an electromechanical systems (EMS) electrostatic actuator coupled to the substrate comprising:
a load beam electrode coupled to a light modulator; anda drive beam electrode having a first portion positioned adjacent to the load beam, a second portion positioned behind the first portion with respect to the load beam, and an end portion connecting the first portion to the second portion, wherein the thickness of the second portion varies along its length.