发明名称 |
Direct injection phase change temperature control system |
摘要 |
A thermal control unit (TCU) for controlling temperature of a device under test (DUT) includes a sealed evaporation chamber disposed therein, the evaporation chamber configured with a refrigerant inlet and a refrigerant outlet; and at least one surface for thermal engagement of the device under test and configured to conduct heat to the evaporation chamber. A test system and a computer program product are disclosed. |
申请公布号 |
EP2778696(A2) |
申请公布日期 |
2014.09.17 |
申请号 |
EP20140160006 |
申请日期 |
2014.03.14 |
申请人 |
SENSATA TECHNOLOGIES MASSACHUSETTS, INC. |
发明人 |
LOPEZ, CHRISTOPHER A.;LEMCZYK, THOMAS F.;DAVIS, RICK A. |
分类号 |
G01R31/28;F28D15/02;H01L23/427;H05K7/20 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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