PRESSURE TRANSDUCER SUBSTRATE WITH SELF ALIGNMENT FEATURE

摘要

In an embodiment, a device includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal depression part that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly, and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to be inserted into the polygonal depression part in the stack.