发明名称 APPARATUS FOR SPREADING ADHESIVE AND METHOD OF MEASURING HIGHT OF A SPRAY NOZZLE USING THE APPARATUS
摘要 Provided is an apparatus for applying an adhesive, which includes: a correction stage marked with a first reference line; a substrate stage provided at one side of the correction stage to support a substrate having a second reference line marked thereon; a spray nozzle provided movably in horizontal and vertical directions to spray the adhesive to the substrate; a lens provided at one side of the nozzle to move together with the nozzle, and to make first and second reference lines viewed as being distorted; a camera provided on the spray nozzle and the lens to photograph the first and second reference lines viewed as being distorted or viewed as they were through the lens according to the height of the spray nozzle; and a calculating unit for acquiring an interval between the first reference line viewed as being distorted and the first reference line viewed as it was through the lens according to the height of the spray nozzle, which are obtained from images of the first reference line photographed by the camera, to calculate the correlation between the height of the spray nozzle and the interval and for determining an interval between the second reference line viewed as being distorted and the second reference line viewed as it was through the lens, which are obtained from images of the second reference line, on the basis of the correlation to calculate the height of the spray nozzle to the substrate. Therefore, the height of the spray nozzle can be calculated with respect to the substrate without the contact between the spray nozzle and the substrate.
申请公布号 KR101442421(B1) 申请公布日期 2014.09.17
申请号 KR20130092423 申请日期 2013.08.05
申请人 SEMES CO., LTD. 发明人 MUN, GANG HYUN;LIM, SOK TAEK
分类号 H01L21/52;H01L21/02;H01L21/58 主分类号 H01L21/52
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