发明名称 FILTER AND APPARATUS FOR TREATING SUBSTRATE COMPRISING THE SAME
摘要 The present invention relates to a filter and a substrate treating apparatus including the same. A filter according to an embodiment of the present invention can include a first band-rejection filter rejecting the predetermined frequency range; a second band-rejection filter rejecting the frequency range; and a band pass filter connected between the first band-rejection filter and the second band-rejection filter.
申请公布号 KR20140110391(A) 申请公布日期 2014.09.17
申请号 KR20130024630 申请日期 2013.03.07
申请人 SEMES CO., LTD. 发明人 SON, DUK HYUN
分类号 H01L21/3065;H01L21/205;H01L21/687 主分类号 H01L21/3065
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