FinFET structure with multiple workfunctions and method for fabricating the same

摘要

A method for fabricating a multiple-workfunction FinFET structure includes depositing a first workfunction material in a layer in a plurality of trenches of the FinFET structure and etching the first workfunction material layer so as to completely remove the first workfunction material layer from all but a first trench of the plurality of trenches. Further, the method includes depositing a second workfunction material in a layer in the plurality of trenches and etching the second workfunction material layer so as to completely remove the second workfunction material layer from all but a second trench of the plurality of trenches. Still further, the method includes depositing a third workfunction material in a layer in the plurality of trenches.

主权项

1. A method for fabricating a multiple-workfunction FinFET structure, comprising:
depositing an n-type workfunction material in a layer over a plurality of fins and in a plurality of trenches between said fins; depositing a deep ultraviolet light-absorbing oxide (DUO) material over the n-type workfunction material layer; differentially etching the DUO material so as to completely remove the DUO material from all but a first trench of the plurality of trenches, wherein at least a portion of the n-type workfunction material remains in the first trench; depositing a p-type workfunction material in a layer over the plurality of fins and in the plurality of trenches between said fins; depositing a DUO material over the p-type workfunction material layer; differentially etching the DUO material so as to completely remove the DUO material from all but a second trench of the plurality of trenches, wherein at least a portion of the p-type workfunction material remains in the second trench; and depositing a mid-gap workfunction material in a layer over the plurality of fins and in the plurality of trenches.