Radiation Source

摘要

A radiation source having a fuel stream generator (110) that generates and directs a fuel stream (102) along a trajectory towards a plasma formation location (104). A pre-pulse laser radiation assembly directs a first beam of laser radiation (100) at the fuel stream at the plasma formation location to generate a modified fuel target (106). A main pulse laser radiation assembly directs a second beam of laser radiation (108) at the modified fuel target at the plasma formation location to generate a radiation generating plasma (117). A collector (122) collects the radiation and directs it along an optical axis (105) of the radiation source. The first beam of laser radiation being directed toward the fuel stream substantially along the optical axis.

主权项

1. A radiation source comprising:
a fuel stream generator configured to generate a fuel stream and to direct the fuel stream along a trajectory towards a plasma formation location; a pre-pulse laser radiation assembly configured to:
direct a first beam of laser radiation at the fuel stream at the plasma formation location substantially along an optical axis of the radiation source, andgenerate, in use, a modified fuel target comprising a desired shape and orientation; a main pulse laser radiation assembly configured to:
direct a second beam of laser radiation at the modified fuel target at the plasma formation location substantially at an angle of greater than 0 degrees and less than 90 degrees with respect to the optical axis, andgenerate, in use, a radiation generating plasma,wherein the desired shape of the modified fuel target ensures reflection of a portion of the second beam of laser radiation that is unused by the modified fuel target in generation of the radiation generating plasma; and a collector configured to:
collect radiation generated by the radiation generating plasma; anddirect the collected radiation along the optical axis.