| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid actuator which is simple in structure, allows a protective film to be largely deformed, and is easily downsized.SOLUTION: In a liquid actuator 2, a liquid swollen part 6 consisting of a liquid such as silicone oil is formed on a first electrode 4 on a base plate 3, a top face of the liquid swollen part 6 is covered with a protective film 10 consisting of parylene (R) or the like, and a second electrode 12 is formed on a top face of the protective film 10. The base plate 3 is provided with an escape channel 16 penetrating from the first electrode 4 of the top face to an underside. A cross sectional size (for example, diameter) of the escape channel 16 is predetermined such that the surface tension of the liquid exceeds other external forces. By applying a voltage between the electrodes 4, 12, the protective film 10 presses the liquid swollen part 6 downward when moving both of the electrodes 4, 12 close to each other. According to the pressing action, the liquid of the liquid swollen part 6 intrudes into the escape channel 16 and the volume of the liquid swollen part 6 on the top side of the base plate 3 is decreased. The liquid actuator 2 can be manufactured by an MEMS process. |
