PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To align a carrier which carries a pattern and a transfer object onto which the pattern is transferred highly accurately.SOLUTION: A carrier BL which carries a pattern and a transfer object SB onto which the pattern is transferred are arranged in a facing manner. First holding means 61 is moved based on a result of capturing an image of at least a part of an outer edge of the carrier BL, and the carrier BL is positioned on a first target position. Second holding means 41 is moved based on a result of capturing an image of at least a part of an outer edge of the transfer object SB, and the transfer object SB is positioned on a predetermined second target position. Images of a first alignment mark formed on the carrier BL and a second alignment mark formed on the transfer object are captured, and at least one of the first holding means 61 and the second holding means 41 is moved based on a result of capturing the images, and alignment between the carrier BL and the transfer object SB is performed.