发明名称 |
TERAHERTZ WAVE DETECTION APPARATUS, CAMERA, IMAGING DEVICE, AND MEASURING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a terahertz wave detection apparatus which suppresses deterioration of detection sensitivity due to electrical noise.SOLUTION: A terahertz wave detection apparatus 100 comprises: an absorption unit 60 absorbing a terahertz wave to generate heat; and a conversion unit 30 converting heat generated by the absorption unit 60 into an electric signal. The absorption unit 60 includes: a dielectric layer 62; a plurality of metal structures 64 provided on one surface 62a of the dielectric layer 62 and arranged separated from each other at a cycle with a predetermined length; and a metal layer 36 provided on the other surface 62b of the dielectric layer 62. The cycle with a predetermined length of the metal structure 64 is smaller than the wavelength of the terahertz wave absorbed by the absorption unit 60. |
申请公布号 |
JP2014163674(A) |
申请公布日期 |
2014.09.08 |
申请号 |
JP20130031789 |
申请日期 |
2013.02.21 |
申请人 |
SEIKO EPSON CORP |
发明人 |
TOMIOKA HIROTO |
分类号 |
G01J1/02;G01N21/3581;H01L27/144;H01Q17/00 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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