发明名称 TERAHERTZ WAVE DETECTION APPARATUS, CAMERA, IMAGING DEVICE, AND MEASURING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a terahertz wave detection apparatus which suppresses deterioration of detection sensitivity due to electrical noise.SOLUTION: A terahertz wave detection apparatus 100 comprises: an absorption unit 60 absorbing a terahertz wave to generate heat; and a conversion unit 30 converting heat generated by the absorption unit 60 into an electric signal. The absorption unit 60 includes: a dielectric layer 62; a plurality of metal structures 64 provided on one surface 62a of the dielectric layer 62 and arranged separated from each other at a cycle with a predetermined length; and a metal layer 36 provided on the other surface 62b of the dielectric layer 62. The cycle with a predetermined length of the metal structure 64 is smaller than the wavelength of the terahertz wave absorbed by the absorption unit 60.
申请公布号 JP2014163674(A) 申请公布日期 2014.09.08
申请号 JP20130031789 申请日期 2013.02.21
申请人 SEIKO EPSON CORP 发明人 TOMIOKA HIROTO
分类号 G01J1/02;G01N21/3581;H01L27/144;H01Q17/00 主分类号 G01J1/02
代理机构 代理人
主权项
地址