| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of easily performing an adequate correction of a spherical aberration according to an observation object surface.SOLUTION: A microscope system 100 includes: an object lens 14 provided with a correction ring 13 for correcting a spherical aberration; a computer 20 for calculating an optimum value of the correction ring 13 according to an observation object surface of a sample S orthogonal to an optical axis of the object lens 14; and a correction ring drive mechanism 17 for driving the correction ring 13 according to the optimum value calculated by the computer 20. The computer 20 obtains a plurality of combinations of a relative position of the object lens 14 for a sample S and the optimum value which is a setting value of the correction ring 13 in a state where the spherical aberration generated according to the relative position is corrected, calculates a function showing a relationship between the relative position and the optimum value by interpolation based on the obtained plurality of combinations, and calculates the optimum value according to the observation object surface based on the function and the relative position determined from the observation object surface. |
