| 摘要 |
The invention provides a method for recycling the carbon-chuck for manufacturing polycrystalline silicon. The method is characterized in that by effectively separating the polycrystalline silicon which is plated on the carbon-chuck through vapor deposition, the polycrystalline silicon is recycled and the carbon-chuck which is used in the procedure of manufacturing polycrystalline silicon is recycled as well. The method for recycling the carbon-chuck for manufacture of polycrystalline silicon comprises steps of separating carbon-chuck- polycrystalline silicon end-with polycrystalline silicon attached on and putting the carbon-chuck- polycrystalline silicon end into a separate medium to react. |
