MINIATURE SENSOR STRUCTURES FOR ION MOBILITY SPECTROMETERS

摘要

For ion mobility spectrometry applications, a desired shape of a sensor structure may be created by forming a desired shape from a ceramic material, such as aluminum nitride. In various embodiments, the sensor structure may be formed using discrete individual ceramic sheets and/or from a preformed ceramic tube. Via holes are formed into the sensor structure to provide for efficient circuitry configurations of the IMS drift tube and/or providing electrical connections between the interior and exterior of the drift tube.

主权项

1. A method for making a sensor structure, comprising:
forming a shaped structure made of a high temperature, non-electrically-conductive ceramic material; forming at least one via hole in the shaped structure; forming circuitry features on the shaped structure; and processing the shaped structure to obtain a sensor structure.