| 摘要 |
<p>As patterning techniques for functional organic thin films, there is the printing method and theμCP method. However, it has been difficult to pattern a minute pattern on a large substrate and to pattern onto a transfer substrate having surface bumpiness. Therefore, provided is a technique for patterning a minute pattern on a large substrate at a functional organic molecule thin film using electromagnetic waves such as X-rays. An organic thin film is patterned by means of a device configuration provided with: an electron beam source (1); an electron acceleration tube (5) for accelerating the electron beam generated by the electron beam source; an undulator magnet array (9); and a bending electromagnet (8) between the electron acceleration tube and the undulator magnet array and for controlling the generation and propagation direction of electromagnetic waves arising in the undulator magnet array.</p> |
