发明名称 |
SUBSTRATE TRANSFERRING APPARATUS FOR LARGE AREA DEPOSITION SYSTEM |
摘要 |
<p>The provided is a substrate transferring apparatus which comprises a chamber; a substrate support equipped in the chamber to support a substrate; a guide rail equipped in the chamber to guide the movement of the substrate support by joining the substrate support; and a linear electric motor tied to the substrate support to provide driving force to move the substrate support.</p> |
申请公布号 |
KR20140103427(A) |
申请公布日期 |
2014.08.27 |
申请号 |
KR20130016755 |
申请日期 |
2013.02.18 |
申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
KIM, SUNG JIN |
分类号 |
H01L21/677;C23C14/34;H01L21/205;H01L51/56 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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