发明名称 Reading circuit for MEMS gyroscope having inclined detection directions
摘要 A multi-axis gyroscope includes a microelectromechanical structure configured to rotate with respective angular velocities about respective reference axes, and including detection elements, which are sensitive in respective detection directions and generate respective detection quantities as a function of projections of the angular velocities in the detection directions. The gyroscope including a reading circuit that generates electrical output signals, each correlated to a respective one of the angular velocities, as a function of the detection quantities. The reading circuit includes a combination stage that combines electrically with respect to one another electrical quantities correlated to detection quantities generated by detection elements sensitive to detection directions different from one another, so as to take into account a non-zero angle of inclination of the detection directions with respect to the reference axes.
申请公布号 US8813565(B2) 申请公布日期 2014.08.26
申请号 US201313789496 申请日期 2013.03.07
申请人 STMicroelectronics S.r.l. 发明人 Caminada Carlo;Prandi Luciano
分类号 G01C19/56 主分类号 G01C19/56
代理机构 Seed IP Law Group PLLC 代理人 Seed IP Law Group PLLC
主权项 1. A device, comprising: a multi-axis gyroscope configured to rotate in response to angular velocities about a first axis and a second axis, the gyroscope including: a first pair of detection elements, each detection element being configured to detect rotation about the first axis and the second axis, the first pair of detection elements being aligned with each other along a third axis at a non-zero angle of inclination with respect to the first and second axes, the first pair being configured to generate a first set of detection signals;a second pair of detection elements, each detection element being configured to detect rotation about the first axis and the second axis, the second pair of detection elements being aligned with each other along a fourth axis different from the third axis, the fourth axis being at a non-zero angle of inclination from the first and second axes, the second pair being configured to generate a second set of detection signals; a reading circuit coupled to the gyroscope, the reading circuit including: a combination stage configured to combine the first and second sets of detection signals to produce a first combination signal and a second combination signal, the combination stage configured to account for the non-zero angle of inclination of the third and fourth axes, the combination stage is configured to receive timing signals to short circuit in pairs one of the detection elements from the first pair and one of the detection elements from the second pair; andan output stage configured to provide a first and a second electrical output signal based on the first and second combination signals received from the combination stage, the first output signal being correlated to the angular velocity about the first axis and the second output signal being correlated to the angular velocity about the second axis.
地址 Agrate Brianza IT